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Saturday, August 1, 2020 | History

2 edition of Laser induced damage in single crystal calcium fluoride found in the catalog.

Laser induced damage in single crystal calcium fluoride

Ian Laidler

Laser induced damage in single crystal calcium fluoride

by Ian Laidler

  • 213 Want to read
  • 36 Currently reading

Published .
Written in English


Edition Notes

Thesis(Ph.D.) - Loughborough University of Technology.

Statementby Ian Laidler.
ID Numbers
Open LibraryOL13931023M

laser induced damage thresholds on the materials. DUV/VUV lithography-grade calcium fluoride (CaF2) is the only candidate for such applications. The demands on the surface are high precision in figure and smoother surface roughness, though the crystal is soft and relatively high thermal expansion coefficient, as well as higher.   Xiao Chen, Jianfeng Xu, Haisheng Fang, Ruiji Tian, Influence of cutting parameters on the ductile-brittle transition of single-crystal calcium fluoride during ultra-precision cutting, The International Journal of Advanced Manufacturing Technology, /s, 89, 1 .

Single crystal calcium fluoride (CaF2) is currently being studied for use as an optical material for vacuum ultra-violet applications. It is also being investigated as a material for lithographic masks. Metal halides have a strong tendency to form point defects under energetic particle and photon irradiation. Defect generation is the basis for mask exposure, but is highly detrimental to optics. Calcium Fluoride (CaF2) was selected owing to its cubic symmetry and excellent luminescence properties as a crystal of interest, and ultrafast laser inscription of in-bulk double-track waveguides was realized. The guiding properties of these waveguides in relation to the writing energy of the femtosecond pulse are presented. The modified double-track waveguides have been studied by systematic.

Calcium fluorides, as laser substrates, possess various advantages of large size, high thermal conductivity, well controlled crystal growth processes, and low nonlinear refractive coefficient. Trivalent rare-earth ions, like Tm, Nd, Pr, doped CaF 2 crystals behave broad, smooth absorption and emission spectra due to heterovalent substitution of. Single crystal calcium fluoride (CaF2) is a material currently being used in vacuum ultraviolet optical components. Unfortunately, all metal halides have a tendency to form defects under energetic particle and laser irradiation, and these defects can degrade material properties.


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Laser induced damage in single crystal calcium fluoride by Ian Laidler Download PDF EPUB FB2

Laser induced damage in single crystal calcium uoride This item was submitted to Loughborough University's Institutional Repository by the/an author. Additional Information: • A Doctoral Thesis.

Submitted in partial ful lment of the requirements for the award of Doctor of Philosophy of Loughborough Universit.y. A study was performed to investigate the effects of radiation damage in calcium fluoride and magnesium fluoride crystals caused by gamma rays and UV photons from excimer lasers.

The purpose was to study and correlate the damage caused by these two different mechanisms in various types of material used for fabricating optical elements in high power excimer lasers and lens.

Laser induced damage in single crystal calcium fluoride The thesis describes the establishment of a laser damage facility in the ultra violet. The laser is a pulsed excimer laser (25 n sec) capable of an output energy of 1 Joule at wavelengths of,and nm.

(Laser-induced ion mass analyser) is reported and the Cited by: 1. The laser-induced damage threshold of a calcium fluoride (CaF2) single crystal was obtained by a nm ArF excimer laser.

The damage morphology of the crystal was analyzed. The results showed that the surface of CaF2 single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved : Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, X.

@article{osti_, title = {Laser-Induced Damage of Calcium Fluoride}, author = {Espana, A and Joly, A G and Hess, W P and Dickinson, J T}, abstractNote = {As advances continue to be made in laser technology there is an increasing demand for materials that have high thresholds for laser-induced damage.

Laser damage occurs when light is absorbed, creating defects in the crystal lattice. Laser induced damage in single crystal calcium fluoride.

for the award of Doctor of Philosophy of Loughborough thesis describes the establishment of a laser damage facility\ud in the ultra violet. The laser is a pulsed excimer laser (25 n sec)\ud capable of an output energy of 1 Joule at wavelengths of,\ud  Surface damage and material failure mechanism of CaF 2 single crystal by nm/ ns laser pulses are systematically studied in this work.

Surface damage characteristics, such as damage threshold, damage growth threshold, damage growth laws and damage growth coefficient of CaF 2 crystal are carefully studied.

Surface material cracking and local material vitrification (from CaF 2 crystal. This paper describes the ANAB technology and summarizes smoothing results for calcium fluoride laser windows.

It further correlates laser damage threshold improvements with the smoothing produced by ANAB surface treatment. All ANAB processing was performed at Exogenesis Corporation using an nAccelTM Accelerated Particle Beam processing tool. The artificially grown calcium fluoride is one of key materials for microlithography and used for excimer laser optics etc.

Such calcium fluoride is required high laser durability and laser induced bulk damage threshold (LIDT). However, the artificially grown calcium fluoride is not a complete crystal, and there are a lot of sub-grain boundaries inside the crystal that have the possibility of causing degradation of laser durability.

Large Size single Calcium Fluoride(CaF 2) crystal are being used as lens material in optical lithography exposure tools for manufacturing semiconductor integrated excellent transparency,optical homogeneity, and laser quantities of them with diameters greater than mm are crystals are used because they increase thenumerical aperture, which in turn.

Artificially grown excimer grade calcium fluoride is one of key optical materials used in microlithography applications. Such calcium fluoride is required for optical components requiring high laser durability and laser induced bulk damage threshold (LIDT).

The mechanical properties of calcium fluoride can vary depending on the crystal axis, and. Abstract. The laser-induced damage threshold of a calcium fluoride (CaF 2) single crystal was obtained by a nm ArF excimer damage morphology of the crystal was analyzed.

The results showed that the surface of CaF 2 single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the. Calcium fluoride single crystals have been deformed in compression to conditions of steady-state deformation in the temperature range to ° C ( to T/T m).

The deformation microstructures have been characterized using cold-stage transmission electron microscopy. The microstructure of deformed samples is seen to consist of dislocation tangles, networks and subgrain boundaries.

Laser-Induced Damage in Optical Materials | Ristau, Detlev | download | B–OK. Download books for free. Find books. Abstract. Calcium fluoride single crystals have been deformed in compression to conditions of steady-state deformation in the temperature range to ° C ( to T/T m).The deformation microstructures have been characterized using cold-stage transmission electron microscopy.

Artificially grown excimer grade calcium fluoride is one of key optical materials used in microlithography applications. Such calcium fluoride is required for optical components requiring high laser durability and laser induced bulk damage threshold (LIDT).

CALCIUM fluoride occurs in Nature as the crystal form known as fluorite. It can, however, be grown artificially as single crystals, and when doped with suitable impurities it is widely used as a.

The depth of the subsurface damage Calcium fluoride (CaF2) is the most suitable optical material layer is measured and there is also an analysis of the for nm lithography, nm lithography as well, laser-induced damage threshold on the ultra-precision because it is endowed with highly suitable optical ground surfaces at a wavelength of nm for the properties in the deep ultra violet.

PHz current switching in calcium fluoride single crystal Ojoon Kwon1,2 and D. Kim1,2,a) 1Department of Physics, Center for Attosecond Science and Technology, Pohang University of Science and Technology, PohangSouth Korea 2Max Planck Center for Attosecond Science, Max Planck POSTECH/Korea Res.

Init., PohangSouth Korea (Received 20 February ; accepted 2. Damage of optical components due to laser irradiation reduces reliability and limits durability.

Calcium fluoride (CaF2) is commonly used for deep UV laser optics because it shows a very low tendency of color center formation as, compared to other UV-X optical materials. Here, we report on the exterior damage of CaF2 UV-X optics due to radiation with high pulse-energy densities (80 mJ/cm2.

LASER INDUCED DAMAGE THRESHOLD Edmund Optics® WHITEPAPER UNDERSTANDING AND SPECIFYING LIDT OF LASER COMPONENTS Laser Induced Damage Threshold (LIDT) is a critical parameter when selecting or specifying laser optics. Underspecifying LIDT can lead to catastrophic component failure in the lab or field, risking the performance of critical equipment.Extending our previous work on the dynamics of femtosecond laser ablation from dielectrics, we concentrate in this contribution on calcium fluoride () surfaces.

Upon irradiation with femtosecond pulses at intensities below the single-pulse.surface is contamination free and also damage free. Incident angle: Fig.

5. The relation between the X-ray reflectivity and Fig. 6. The laser-induced damage thresholds of ground surface roughness on Si single crystal substrate at the and polished laser-glass surfaces at the wavelength of.